Reactive ion etching of LiNbO3
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.92177
Reference10 articles.
1. Geodesic lenses in single‐mode LiNbO3waveguides
2. Ion Beam Micromachining of Integrated Optics Components
3. Lithium niobate ridge waveguide modulator
4. Efficient LiNbO3balanced bridge modulator/switch with an ion‐etched slot
5. Efficient optical waveguide coupler
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