Bilayer gate dielectric study by scanning tunneling microscopy
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2780084
Reference15 articles.
1. High-κ gate dielectrics: Current status and materials properties considerations
2. Electrical properties of vacuum annealed La2O3 thin films grown by E-beam evaporation
3. Space-Charge-Limited Currents in La2O3Thin Films Deposited by E-Beam Evaporation after Low Temperature Dry-Nitrogen Annealing
4. Effect of Post-Metallization Annealing on Electrical Characteristics of La2O3Gate Thin Films
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