Effects of substrate temperature on structural properties of undoped silicon thin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1474611
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1. On the Way Towards High Efficiency Thin Film Silicon Solar Cells by the “Micromorph” Concept
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3. Development of highly conductiven‐type μc‐Si:H films at low power for device applications
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