Hydrogen effect on structural and optical properties of in-situ fabricated nc-Si:H prepared by facing targets sputtering

Author:

Meng Linghai,Cheng Haijuan,Liu Shiyu,Wu Yong,Li Dong,Fu Jianbo,Jiang Shengxiang,Zong Hua,Zhang Mengjiao

Publisher

Elsevier BV

Subject

Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference45 articles.

1. Tunable photoluminescence from nc-Si/a-SiNx:H quantum dot thin films prepared by ICP-CVD;Sain;Phys. Chem. Chem. Phys.,2013

2. Stability of nc-Si:H TFTs with silicon nitride gate dielectric;Lee;IEEE Trans. Electron Devices,2017

3. A simple optimization of triple-junction solar cell nc-Si:H/a-Si:H/a-SiGe:H using computer modeling and robust design;Abuzairi;Adv. Mat. Res.,2014

4. Effect of silane flow rate on microstructure of silicon films deposited by HWCVD;Gogoi;J. Non-Cryst Solids,2012

5. Enhancement of porous silicon photoluminescence by chemical and electrochemical infiltration of conducting polymers;Harraz;Scr. Mater.,2013

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