An interferometric system for measuring thickness of parallel glass plates without 2π ambiguity using phase analysis of quadrature Haidinger fringes-Reference-Cited by-同舟云学术

An interferometric system for measuring thickness of parallel glass plates without 2π ambiguity using phase analysis of quadrature Haidinger fringes

Published:2017-05 Issue:5 Volume:88 Page:055108
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Kim Jong-Ahn¹,Kim Jae Wan¹²,Kang Chu-Shik¹²,Jin Jonghan¹²,Lee Jae Yong¹²

Affiliation:

1. Center for Length, Division of Physical Metrology, Korea Research Institute of Standards and Science, 267 Gajeong-ro, Yuseong-gu 305-340, South Korea

2. Department of Science of Measurement, Korea University of Science and Technology, 217 Gajeong-ro, Yuseong-gu 305-350, South Korea

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4983314

Reference14 articles.

1. Application of the astigmatic method to the thickness measurement of glass substrates

2. Refractive index and geometrical thickness measurement of a transparent pellicle in air by Gaussian beam defocusing

3. Differential heterodyne interferometer for measuring thickness of glass panels

4. Quadrature laser interferometer for in-line thickness measurement of glass panels using a current modulation technique

5. Simultaneous measurement of refractive index and thickness by combining low-coherence interferometry and confocal optics

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Portable contactless caliper;Applied Optics;2023-12-21

2. Birefringence of cellulose: review, measurement techniques, dispersion models, biomedical applications and future perspectives;Wood Science and Technology;2023-12-06

3. Common-path tandem interferometer for thin-film thickness measurements;Measurement;2023-06

4. Design and Assessment of Phase-Shifting Algorithms in Optical Interferometer;International Journal of Precision Engineering and Manufacturing-Green Technology;2022-12-13

5. Optical metrology: methodological analogy and duality revisited;Tribute to James C. Wyant: The Extraordinaire in Optical Metrology and Optics Education;2021-09-09