Gray-tone lithography using an optical diffuser and a contact aligner
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2924314
Reference10 articles.
1. The MEMSNAS Process: Microloading Effect for Micromachining 3-D Structures of Nearly All Shapes
2. Microfabricated silicon solid immersion lens
3. Simulation assisted design of processes for gray-tone lithography
4. Shape-controlled, high fill-factor microlens arrays fabricated by a 3D diffuser lithography and plastic replication method
5. Fully complex diffractive optics by means of patterned diffuser arrays: encoding concept and implications for fabrication
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