Abstract
Abstract
We proposed an efficient and low-cost compensation method for improving exposure uniformity. A flexible designed uniformity grayscale template compensation strategy based on digital micromirror device oblique scanning lithography was developed, which can effectively improve exposure region uniformity. In order to avoid the asynchronous error of the exposure process, the light-source synchronization control based on the pulse width modulation strategy was introduced in the lithography system. The experimental results showed that the maximum dimensional difference is decreased from 20.7% to 3.3% by the above strategy. The presented method will have a broad application prospect in the printed circuit board manufacturing field.
Funder
Key Project of Natural Science Research of Anhui Province
Additive Manufacturing Institute, Anhui Polytechnic University
Key Research and development program of Anhui Province
Scientific Research Foundation for the Introduction of Talent of Anhui Polytechnic University
Chinese National Natural Science Foundation
Young and middle-aged top talent project of Anhui Polytechnic University
Natural Science Foundation of Anhui Province
Subject
General Physics and Astronomy,General Engineering
Cited by
1 articles.
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