Growth of single‐crystal TiN/VN strained‐layer superlattices with extremely high mechanical hardness
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.339770
Reference18 articles.
1. Growth and properties of single crystal TiN films deposited by reactive magnetron sputtering
2. Low‐energy ion irradiation during film growth for reducing defect densities in epitaxial TiN(100) films deposited by reactive‐magnetron sputtering
3. A review of the present understanding of the role of ion/surface interactions and photo-induced reactions during vapor-phase crystal growth
4. TEM methods for the characterization of fine metal multilayers
5. Diffusion enhancement due to low‐energy ion bombardment during sputter etching and deposition
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