A detailed experimental and analytical study of the thermal expansion of dielectric thin films on Si by x-ray reflectivity
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2353283
Reference21 articles.
1. High‐temperature laser interferometer for thermal expansion and optical‐length measurements
2. Enhanced photothermal displacement spectroscopy for thin-film characterization using a Fabry-Perot resonator
3. Laser Interferometry and SMX-Techniques for Thermal Characterization of Thin Films
4. Influence of deposition conditions on mechanical properties of low-pressure chemical vapor deposited low-stress silicon nitride films
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