Nanoscale chemical structure variations in nano-patterned and nano-porous low-k dielectrics: A comparative photothermal induced resonance and infrared spectroscopy investigation-Reference-Cited by-同舟云学术

Nanoscale chemical structure variations in nano-patterned and nano-porous low-k dielectrics: A comparative photothermal induced resonance and infrared spectroscopy investigation

Published:2016-09 Issue: Volume:86 Page:223-232
ISSN:0924-2031
Container-title:Vibrational Spectroscopy
language:en
Short-container-title:Vibrational Spectroscopy

Author:

Hu Qichi,Kjoller Kevin,Myers Alan,Singh Kanwal Jit,King Sean W.

Funder

Small Business Innovation Research

National Science Foundation

Intel Corporation

Publisher

Elsevier BV

Subject

Spectroscopy

Reference66 articles.

1. Moore’s crystal ball: Device physics and technology past the 15nm generation

2. 7-nm FinFET CMOS Design Enabled by Stress Engineering Using Si, Ge, and Sn

3. Making lithography work for the 7-nm node and beyond in overlay accuracy, resolution, defect, and cost

4. Research Updates: The three M's (materials, metrology, and modeling) together pave the path to future nanoelectronic technologies

5. Spectroscopic ellipsometry—A perspective

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Frequency-dependent nanomechanical profiling for medical diagnosis;Beilstein Journal of Nanotechnology;2022-12-09

2. Enhanced Thermo–Mechanical Reliability of Ultralow-K Dielectrics with Self-Organized Molecular Pores;Materials;2021-04-28

3. One-step fabrication of transparent superhydrophobic surface;Applied Surface Science;2021-03

4. Atomic force microscopy for nanoscale mechanical property characterization;Journal of Vacuum Science & Technology B;2020-11

5. Thermal conductivity-structure-processing relationships for amorphous nano-porous organo-silicate thin films;Journal of Porous Materials;2019-12-16