Piezoreflectance study of an Fe-containing silicon carbon nitride crystalline film
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.371856
Reference10 articles.
1. Recent developments in hard materials
2. Formation of crystalline silicon carbon nitride films by microwave plasma-enhanced chemical vapor deposition
3. Composition of SiCN crystals consisting of a predominantly carbon-nitride network
4. Crystalline silicon carbon nitride: A wide band gap semiconductor
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3. Si–C–N–Fe nanostuctured ceramics from inorganic polymer precursors obtained by plasma polymerization;Materials Science and Engineering: C;2007-09
4. Heteroepitaxial silicon-carbide nitride films with different carbon sources on silicon substrates prepared by rapid-thermal chemical-vapor deposition;Journal of Electronic Materials;2002-12
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