Cubic Single-Crystalline Si[sub 1−x−y]C[sub x]N[sub y] Films with Mirror Face Prepared by RTCVD-Reference-Cited by-同舟云学术

Cubic Single-Crystalline Si[sub 1−x−y]C[sub x]N[sub y] Films with Mirror Face Prepared by RTCVD

Published:2001 Issue:11 Volume:4 Page:G91
ISSN:1099-0062
Container-title:Electrochemical and Solid-State Letters
language:en
Short-container-title:Electrochem. Solid-State Lett.

Author:

Ting Shyh-Fann,Fang Yean-Kuen,Hsieh Wen-Tse,Tsair Yong-Shiuan,Chang Cheng-Nan,Lin Chun-Sheng,Hsieh Ming-Chun,Chiang Hsin-Che,Ho Jyh-Jier

Publisher

The Electrochemical Society

Subject

Electrical and Electronic Engineering,Electrochemistry,Physical and Theoretical Chemistry,General Materials Science,General Chemical Engineering

Reference6 articles.

1. Piezoreflectance study of an Fe-containing silicon carbon nitride crystalline film

2. L. An, W. Zhang, V. M. Bright, M. L. Dunn, and R. Raj, in IEEE Micro Electromechanical Systems 2000, Proceedings of MEMS 2000. The 13th Annual International Conference , p. 619, Jan 23-27, 2000.

3. Influence of deposition condition and hydrogen on amorphous-to-polycrystalline SiCN films

4. Crystalline SiCN: a hard material rivals to cubic BN

5. Deposition of silicon carbon nitride films by ion beam sputtering

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