Structural and electronic characterization of (2,33) bar-shaped stacking fault in 4H-SiC epitaxial layers
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3551542
Reference19 articles.
1. Degradation of hexagonal silicon-carbide-based bipolar devices
2. Structural analysis and reduction of in-grown stacking faults in 4H–SiC epilayers
3. Characterization of stacking faults in 4H-SiC epilayers by room-temperature microphotoluminescence mapping
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1. Revisiting stacking fault identification based on the characteristic photoluminescence emission wavelengths of silicon carbide epitaxial wafers;Materials Science in Semiconductor Processing;2024-06
2. Observation of broad triangular Frank-type stacking faults and characterization of stacking faults with emission wavelengths below 430 nm in 4H–SiC epitaxial layers;Applied Physics Letters;2024-04-08
3. First-principles investigation of the effects of excess carriers on the polytype stability and stacking fault energies of SiC;Journal of Applied Physics;2023-10-17
4. Optoelectronic and structural characterization of trapezoidal defects in 4H-SiC epilayers and the effect on MOSFET reliability;Journal of Applied Physics;2023-08-18
5. Defect reduction in SiC epilayers by different substrate cleaning methods;Materials Science in Semiconductor Processing;2022-03
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