Thin thermal oxides of silicon and the orientation effect: An empirical approach
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.348467
Reference32 articles.
1. EFFECT OF CRYSTAL ORIENTATION ON OXIDATION RATES OF SILICON IN HIGH PRESSURE STEAM
2. Thermal oxidation of silicon in various oxygen partial pressures diluted by nitrogen
3. Reversal of Relative Oxidation Rates of <111> and <100> Oriented Silicon Substrates at Low Oxygen Partial Pressures
4. Silicon Oxidation Studies: Silicon Orientation Effects on Thermal Oxidation
5. Thin Thermal Oxide on Silicon
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