Pulsed laser annealing of Be-implanted GaN
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2120893
Reference23 articles.
1. InGaN/GaN/AlGaN-based laser diodes with modulation-doped strained-layer superlattices grown on an epitaxially laterally overgrown GaN substrate
2. GaN, AlN, and InN: A review
3. Annealing of ion implanted gallium nitride
4. Ion implantation doping and isolation of GaN
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