A modification to the Sigmund model of ion sputtering
Author:
Affiliation:
1. Department of Physics, Colorado State University, Fort Collins, Colorado 80523, USA
2. II. Physikalisches Institut, Universität Göttingen, Friedrich-Hund-Platz 1, 37077 Göttingen, Germany
Funder
National Science Foundation (NSF)
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4904438
Reference28 articles.
1. Highly ordered nanopatterns on Ge and Si surfaces by ion beam sputtering
2. Ordered nanocrystals on argon ion sputtered polymer film
3. Self-organized nanopatterning of silicon surfaces by ion beam sputtering
4. Formation of Ordered Nanoscale Semiconductor Dots by Ion Sputtering
5. Roughness Evolution of Ion Sputtered Rotating InP Surfaces: Pattern Formation and Scaling Laws
Cited by 20 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Effects of 300 keV N+ Ion Irradiation on Radio-Frequency Sputtered Al-ZnO Thin Films for a Low Energy Regime;ECS Journal of Solid State Science and Technology;2023-07-01
2. Deep neural network-based reduced-order modeling of ion–surface interactions combined with molecular dynamics simulation;Journal of Physics D: Applied Physics;2023-06-22
3. Modeling tungsten response under helium plasma irradiation: a review;Plasma Science and Technology;2022-11-30
4. Simulation of the evolution of rough surfaces by sputtering using the binary collision approximation;Radiation Effects and Defects in Solids;2022-07-20
5. A perspective on nanoscale pattern formation at surfaces by ion-beam irradiation;Journal of Applied Physics;2020-11-14
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3