The sheath effect on the floating harmonic method
Author:
Funder
National Research Foundation of Korea
National Research Foundation of Korea (NRF)
Ministry of Trade, Industry and Energy (MOTIE)
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4936347
Reference16 articles.
1. Floating probe for electron temperature and ion density measurement applicable to processing plasmas
2. Non-invasive in situ plasma monitoring of reactive gases using the floating harmonic method for inductively coupled plasma etching application
3. A plasma diagnostic technique using a floating probe for the dielectric deposition process
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1. A method for measuring electron temperature and ion density with immunity to RF fluctuation and ion current;Physics of Plasmas;2023-02-01
2. Compensation of the sheath effects in cylindrical floating probes;Physics of Plasmas;2018-05
3. Floating harmonic probe measurements in the low-temperature plasma jet deposition system;Journal of Physics D: Applied Physics;2017-12-19
4. The radio-frequency fluctuation effect on the floating harmonic method;Physics of Plasmas;2016-08
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