Rapid annealing of GaAs: Uniformity and temperature dependence of activation
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.337779
Reference9 articles.
1. Transient thermal annealing in GaAs
2. Diffusion phenomena and defect generation in rapidly annealed GaAs
3. Rapid Thermal Annealing in GaAs IC Processing
4. Crystallographic slip in GaAs wafers annealed using incoherent radiation
5. Non-destructive characterization of electrical uniformity in semi-insulating GaAs substrates by microwave photoconductance technique
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