Author:
Borisenko Victor E.,Hesketh Peter J.
Reference208 articles.
1. GaAs Microelectronics, edited by N. G. Einspruch and W. R. Wisseman (Academic Press, New York, 1985).
2. B. L. Sharma, Implantation in InP technology, Solid State Technol. 32(11), 113–117 (1989).
3. V. E. Borisenko, V. V. Gribkovskii, V. A. Labunov, and S. G. Yudin, Pulsed heating of semiconductors, Phys. Status Solidi A
86(2), 573–583 (1984).
4. S. S. Gill and B. J. Sealy, Review of rapid thermal annealing of ion implanted GaAs, J. Electrochem. Soc.
133(12), 2590–2596 (1986).
5. R. Singh, Rapid isothermal processing, J. Appl. Phys.
63(8), R59–R114 (1988).