Mode transition between growth and decomposition of oxides on Si(001): Kinetically determined critical coverage for oxidation
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1326037
Reference14 articles.
1. The reaction of atomic oxygen with Si(100) and Si(111)
2. The interaction of molecular and atomic oxygen with Si(100) and Si(111)
3. Real-time measurements of Si2pcore level during dry oxidation of Si(100)
4. Initial Oxidation of Si(100)-(2×1)as an Autocatalytic Reaction
5. High-Temperature SiO2Decomposition at the SiO2/Si Interface
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