SiO Desorption Kinetics of Si(111) Surface Oxidation Studied by Real-Time Photoelectron Spectroscopy-Reference-Cited by-同舟云学术

SiO Desorption Kinetics of Si(111) Surface Oxidation Studied by Real-Time Photoelectron Spectroscopy

Author:

Tang Jiayi¹,Nishimoto Kiwamu¹,Ogawa Shuichi¹,Yoshigoe Akitaka²,Ishidzuka Shinji³,Watanabe Daiki¹,Teraoka Yuden²,Takakuwa Yuji¹

Affiliation:

1. Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, Japan

2. Japan Atomic Energy Agency, Japan

3. Nagaoka University of Technology, Japan

Publisher

Surface Science Society Japan

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanics of Materials,Condensed Matter Physics,Bioengineering,Biotechnology

Link

Reference24 articles.

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4. [4] Y. Takakuwa, F. Ishida, and T. Kawawa, Appl. Surf. Sci. 190, 20 (2002).

5. [5] Y. Takakuwa, F. Ishida, and T. Kawawa, Appl. Surf. Sci. 216, 133 (2003).

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