1. National University of Science and Technology MISiS (NUST MISiS), Moscow 119049, Russia
2. Institute of Microelectronics Technology RAS, Chernogolovka 142432, Russia
3. Laboratory of Radiation Technologies, Frumkin Institute of Physical Chemistry and Electrochemistry Russian Academy of Sciences (IPCE RAS), 31 Leninsky prospect, build. 4, Moscow 119071, Russia
4. National Research Centre “Kurchatov Institute,” Petersburg Nuclear Physics Institute (PNPI), 1 Orlova roshcha, Gatchina 188300, Russian Federation
5. LLC Research and Development Enterprise “Collider,” Moscow 119017, Russia
6. Russian Technological University MIREA (RTU MIREA), 78 Vernadsky Avenue, Moscow 119454, Russia
7. Department of Chemical Engineering, University of Florida, Gainesville, Florida 32611, USA
8. Department of Chemical and Biological Engineering, College of Engineering, Korea University, Anam-dong 5-1, Sungbuk-gu, Seoul 02841, South Korea
9. Department of Material Science and Engineering, University of Florida, Gainesville, Florida 32611, USA