Direct observation of grain growth from molten silicon formed by micro-thermal-plasma-jet irradiation-Reference-Cited by-同舟云学术

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Direct observation of grain growth from molten silicon formed by micro-thermal-plasma-jet irradiation

Published:2012-10-22 Issue:17 Volume:101 Page:172111
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Hayashi Shohei,Fujita Yuji,Kamikura Takahiro,Sakaike Kohei,Akazawa Muneki,Ikeda Mitsuhisa,Hanafusa Hiroaki,Higashi Seiichiro

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4764522

Reference19 articles.

1. Low temperature poly-Si thin-film transistor fabrication by metal-induced lateral crystallization

2. High Performance Low Temperature Polycrystalline Silicon Thin Film Transistors on Non-alkaline Glass Produced Using Diode Pumped Solid State Continuous Wave Laser Lateral Crystallization

3. Advanced Micro-Polycrystalline Silicon Films Formed by Blue-Multi-Laser-Diode Annealing

4. Pulsed laser‐induced amorphization of silicon films

5. Excimer laser-induced temperature field in melting and resolidification of silicon thin films

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1. Investigation on electrical characteristics of TFTs fabricated with germanium films crystallized by atmospheric-pressure micro thermal plasma jet irradiation;Japanese Journal of Applied Physics;2022-02-09

2. Investigation on characteristics of millisecond solid-phase crystallized silicon films annealed by atmospheric pressure DC arc discharge micro-thermal-plasma-jet and their application to bottom-gate thin film transistors fabrication;Japanese Journal of Applied Physics;2021-09-14

3. Direct observation of ultra-rapid solid phase crystallization of amorphous silicon films irradiated by micro-thermal-plasma-jet;Materials Science in Semiconductor Processing;2021-01

4. Large area annealing by magnetic field scanning of atmospheric pressure thermal plasma beam;Japanese Journal of Applied Physics;2020-04-01

5. Twin formation in micro-chevron laser beam scanning induced one directional crystal growth in Si film on SiO2;Japanese Journal of Applied Physics;2020-02-28

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