High-performance SH-SAW resonator using optimized 30° YX-LiNbO3/SiO2/Si

Author:

Wu Shuxian1ORCID,Wu Zonglin1ORCID,Qian Hangyu1ORCID,Bao Feihong1ORCID,Tang Gongbin2,Xu Feng1ORCID,Zou Jie1ORCID

Affiliation:

1. Key Laboratory for Information Science of Electromagnetic Waves (MoE), School of Information Science and Technology, Fudan University, Shanghai 200438, China

2. Institute of Novel Semiconductors, Shandong University, Jinan 250199, China

Abstract

With the rapid development of 5G technology, acoustic wave filters with large bandwidths are urgently required to deal with the explosive increase in data traffic. Recently, there is extensive attention paid to shear-horizontal (SH) surface acoustic wave (SAW) resonators based on lithium niobate (LiNbO3) substrates, thanks to its large effective coupling coefficient ( k2eff). However, because of the bulk acoustic wave (BAW) energy radiation into the LiNbO3 substrate, it is very challenging to obtain a high quality factor ( Q) for SH-SAW resonators. In this study, a 30° YX-LiNbO3/SiO2/Si SAW resonator with the SH mode is proposed to achieve a large coupling and a high Q simultaneously. By bonding a LiNbO3 thin film onto a thermally oxidized Si(100) substrate, the velocity mismatch between the piezoelectric layer and the SiO2/Si substrate could significantly reduce the BAW energy leakage. Finite element method simulation is employed to optimize the cut angle of the LiNbO3 film and the thickness of each layer. The fabricated SH-SAW resonators with a resonant frequency of 924 MHz yield a k2eff of 24.8% and a maximum of Bode- Q (Bode- Qmax) of 1107. In comparison with the previously reported same-type SAW resonators, a higher Bode- Qmax is demonstrated in this work when their k2eff is larger than 20%, providing a potential solution to enable wideband tunable filters in the 5G communication system.

Funder

Natural Science Foundation of Shanghai

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

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1. Suppression of Transverse Modes in 50°YX-LiTaO3/SiO2/Si POI SAW Resonator with Groove Configuration;ACS Applied Materials & Interfaces;2024-08-22

2. Strain Characteristics of Surface Acoustic Wave Resonators on X-Cut LiTaO3;IEEE Sensors Journal;2024-08-15

3. Special topic on Wide- and ultrawide-bandgap electronic semiconductor devices;Applied Physics Letters;2024-08-12

4. High-Performance Wideband SAW Filters on LNOI Platform;2024 IEEE MTT-S International Conference on Microwave Acoustics & Mechanics (IC-MAM);2024-05-13

5. Thin-Film Lithium Niobate on Insulator Surface Acoustic Wave Devices for 6G Centimeter Bands;2024 IEEE MTT-S International Conference on Microwave Acoustics & Mechanics (IC-MAM);2024-05-13

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