High‐resolution determination of the stress in individual interconnect lines and the variation due to electromigration
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.360255
Reference11 articles.
1. Mechanical properties of thin films
2. The tension of metallic films deposited by electrolysis
3. X‐ray diffraction determination of the effect of various passivations on stress in metal films and patterned lines
4. Morphic effects II-effects of external forces on the frequencies of theq ≈ 0 optical phonons
5. Micro‐Raman study of stress distribution in local isolation structures and correlation with transmission electron microscopy
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