Quantitative analysis of one-dimensional dopant profile by electron holography
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1473702
Reference9 articles.
1. Methods for the measurement of two-dimensional doping profiles
2. Characterization of two-dimensional dopant profiles: Status and review
3. Dopant profile control and metrology requirements for sub-0.5 μm metal–oxide–semiconductor field-effect transistors
4. Direct observation of potential distribution across Si/Sip‐njunctions using off‐axis electron holography
5. Two-Dimensional Mapping of the Electrostatic Potential in Transistors by Electron Holography
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