Atomic layer deposition of epitaxial ferroelectric barium titanate on Si(001) for electronic and photonic applications
Author:
Affiliation:
1. Department of Chemical Engineering, University of Texas at Austin, Austin, Texas 78712, USA
2. Department of Physics, University of Texas at Austin, Austin, Texas 78712, USA
3. IBM Research—Zürich, CH-8803 Rüschlikon, Switzerland
Funder
National Science Foundation
Directorate for Mathematical and Physical Sciences
European Commission
Air Force Office of Scientific Research
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/am-pdf/10.1063/1.5087571
Reference42 articles.
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3. The Quantum Metal Ferroelectric Field-Effect Transistor
4. BaTiO3/SrTiO3 heterostructures for ferroelectric field effect transistors
5. Use of Negative Capacitance to Provide Voltage Amplification for Low Power Nanoscale Devices
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