Effects of post-deposition annealing on BaTiO3/4H-SiC MOS capacitors using aerosol deposition method-Reference-Cited by-同舟云学术

Effects of post-deposition annealing on BaTiO3/4H-SiC MOS capacitors using aerosol deposition method

Published:2024-02-20 Issue:3 Volume:130 Page:
ISSN:0947-8396
Container-title:Applied Physics A
language:en
Short-container-title:Appl. Phys. A

Author:

Choi Ji-Soo,Lee Hyun-Woo,Lee Tae-Hee,Park Se-Rim,Chung Seung-Hwan,Cho Young-Hun,Lee Geon-Hee,Schweitz Michael A.,Park Chulhwan,Shin Weon Ho,Oh Jong-Min,Koo Sang-Mo^ORCID

Funder

Korea Evaluation Institute of Industrial Technology

Publisher

Springer Science and Business Media LLC

Link

https://link.springer.com/content/pdf/10.1007/s00339-024-07285-1.pdf

Reference39 articles.

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2. S.W. Jung, S.M. Koo, BaTiO3–SiC nanopowder composite-based metal-insulator-semiconductor structure prepared by aerosol deposition. J. Nanosci. Nanotechnol.Nanosci. Nanotechnol. 16(11), 11402–11405 (2016). https://doi.org/10.1166/jnn.2016.13517

3. Z. Wang, L. Liu, Simulation research of 4H-SiC double-trench MOSFET with high-k gate dielectric materials. In: 2021 International workshop on advanced patterning solutions (IWAPS). IEEE, pp. 1–4 (2021). https://doi.org/10.1109/IWAPS54037.2021.9671233

4. F. Zhuo, U.R. Eckstein, N.H. Khansur, C. Dietz, D. Urushihara, T. Asaka et al., Temperature-induced changes of the electrical and mechanical properties of aerosol-deposited BaTiO3 thick films for energy storage applications. J. Am. Ceram. Soc. 105(6), 4108–4121 (2022). https://doi.org/10.1111/jace.18377

5. C. Wang, H.J. Kim, F.Y. Meng, H.K. Kim, Y. Li, Z. Yao, N.Y. Kim, Room temperature fabrication of MIMCAPs via aerosol deposition. IEEE Electron Device Lett. 37(2), 220–223 (2015). https://doi.org/10.1109/LED.2015.2506406