X‐ray photoemission analysis and electrical contact properties of NF3plasma cleaned Si surfaces
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.352320
Reference31 articles.
1. Laser‐induced photochemical etching of SiO2studied by x‐ray photoelectron spectroscopy
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4. Electronic Structure of Photochemically Etched Silicon Surfaces
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