Influence of sputtering power on structural, mechanical and photoluminescence properties of nanocrystalline SiC thin films
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Reference5 articles.
1. Structure and photoluminescent properties of SiC layers on Si, synthesized by pulsed ion-beam treatment
2. Material characterization need for SiC-based devices
3. Growth and microhardness of SiC films by plasma-enhanced chemical vapor deposition
4. Improved electrical transport properties in high quality nanocrystalline silicon carbide (nc-SiC) thin films for microelectronic applications
5. Fracture toughness, hardness, and Young’s modulus of tantalum nanocrystalline films
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. In-situ growth mechanism and structural evolution of silicon quantum dots embedded in Si-rich silicon carbide matrix prepared by RF-PECVD;Materials Science and Engineering: B;2023-07
2. Tailoring of stoichiometry and band-tail emission in PLD a-SiC thin films by varying He deposition pressure;SN Applied Sciences;2020-05-11
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