Energy analysis of neutral atoms in broad oxygen ion beams by Doppler‐shift measurements
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.346998
Reference25 articles.
1. Oxygen ion beam etching for pattern transfer
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5. Reactive ion beam etching: Dissociation of molecular ions upon impact
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