High resolution x‐ray diffraction of periodic surface gratings
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.109124
Reference6 articles.
1. High-performance 1.5 mu m wavelength InGaAs-InGaAsP strained quantum well lasers and amplifiers
2. Observation of X-ray bragg diffraction on the periodic surface relief of a perfect silicon crystal
3. X-ray diffraction from corrugated crystalline surfaces and interfaces
4. X-ray Bragg diffraction on periodic surface gratings
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3. Observation of semiconductor device channel strain using in-line high resolution X-ray diffraction;Journal of Applied Physics;2013-10-21
4. Application of inline high resolution x-ray diffraction in monitoring Si/SiGe and conventional Si in SOI fin-shaped field effect transistor processes;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2012-07
5. Crystalline Layer Structures with X-Ray Diffractometry;Springer Handbook of Crystal Growth;2010
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