High resolution x‐ray diffraction of periodic surface gratings

Author:

van der Sluis P.,Binsma J. J. M.,van Dongen T.

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Cited by 29 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Dynamical theory of X-ray diffraction by crystals with different surface relief profiles;Acta Crystallographica Section A Foundations and Advances;2023-01-23

2. Quantification of local strain distributions in nanoscale strained SiGe FinFET structures;Journal of Applied Physics;2017-10-07

3. Observation of semiconductor device channel strain using in-line high resolution X-ray diffraction;Journal of Applied Physics;2013-10-21

4. Application of inline high resolution x-ray diffraction in monitoring Si/SiGe and conventional Si in SOI fin-shaped field effect transistor processes;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2012-07

5. Crystalline Layer Structures with X-Ray Diffractometry;Springer Handbook of Crystal Growth;2010

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