A face-shear mode single crystal ultrasonic motor
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4804627
Reference22 articles.
1. A 1.6-mm, metal tube ultrasonic motor
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3. Ultrasonic Motors
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5. Piezoelectric ultrasonic bidirectional linear actuator for micropositioning fulfilling Feynman’s criteria
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