Effects of humidity on stress in thin silicon dioxide films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.331244
Reference12 articles.
1. Measurement of Strains at Si‐SiO2 Interface
2. Enhanced X‐Ray Diffraction from Substrate Crystals Containing Discontinuous Surface Films
3. High Temperature Camera for X‐Ray Topography
4. The mechanical properties of anodically formed aluminium oxide films
5. Automatic x‐ray diffraction measurement of the lattice curvature of substrate wafers for the determination of linear strain patterns
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