Continuous ultraviolet roll nanoimprinting process for replicating large-scale nano- and micropatterns
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2392960
Reference12 articles.
1. Nanoimprint Lithography for Hybrid Plastic Electronics
2. Improved Pattern Transfer in Nanoimprint Lithography at 30 nm Half-Pitch by Substrate−Surface Functionalization
3. Electrostatic Force-Assisted Nanoimprint Lithography (EFAN)
4. Sub-10 nm imprint lithography and applications
5. Replication qualities and optical properties of UV-moulded microlens arrays
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