Kinetics of solid phase crystallization of amorphous silicon analyzed by Raman spectroscopy
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4818949
Reference15 articles.
1. Structure of As‐Deposited LPCVD Silicon Films at Low Deposition Temperatures and Pressures
2. VAPOR‐LIQUID‐SOLID MECHANISM OF SINGLE CRYSTAL GROWTH
3. Low temperature poly-Si thin-film transistor fabrication by metal-induced lateral crystallization
4. Mode of growth and microstructure of polycrystalline silicon obtained by solid‐phase crystallization of an amorphous silicon film
5. Analysis of solid phase crystallization in amorphized polycrystalline Si films on quartz substrates
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