Analysis of retarding field energy analyzer transmission by simulation of ion trajectories
Author:
Affiliation:
1. University of Technology Eindhoven, Eindhoven, The Netherlands
2. ASML, Veldhoven, The Netherlands
Funder
ASML
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5018269
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1. Plasma etching: Yesterday, today, and tomorrow
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