Development of an energy spread analyzer for secondary ion mass spectrometry ion source
Author:
Affiliation:
1. Institute of Modern Physics, Chinese Academy of Sciences 1 , Lanzhou 730000, China
2. School of Nuclear Science and Technology, University of Chinese Academy of Sciences 2 , Beijing 100049, China
Abstract
Funder
National Key Research and Development Program of China
Department of Science and Technology of Shandong Province
Publisher
AIP Publishing
Subject
Instrumentation
Link
https://pubs.aip.org/aip/rsi/article-pdf/doi/10.1063/5.0146274/16832842/043302_1_5.0146274.pdf
Reference29 articles.
1. Advances in source technology for focused ion beam instruments
2. A New Radio Frequency Plasma Oxygen Primary Ion Source on Nano Secondary Ion Mass Spectrometry for Improved Lateral Resolution and Detection of Electropositive Elements at Single Cell Level
3. The Hyperion-II radio-frequency oxygen ion source on the UCLA ims1290 ion microprobe: Beam characterization and applications in geochemistry and cosmochemistry
Cited by 1 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. A compact radio-frequency ion source for high brightness and low energy spread negative oxygen ion beam production;Review of Scientific Instruments;2023-09-01
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