“Virtual IED sensor” at an rf-biased electrode in low-pressure plasma
Author:
Affiliation:
1. Skobeltsyn Institute of Nuclear Physics, Moscow State University, SINP MSU, Moscow, Russia
2. Faculty of Physics, Moscow State University, MSU, Moscow, Russia
Funder
Russian Science Foundation (RSF)
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4956455
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