Investigation of the Sputtering of Aluminum Using Atomic‐Absorption Spectroscopy
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1658742
Reference8 articles.
1. Energy Distribution of Sputtered Cu Atoms
2. Low‐Energy Sputtering Yields by Resonance Absorption and Emission Spectroscopic Methods
3. Mass Spectrometric Study of Neutral Particles Sputtered from Cu by 0‐ to 100‐eV Ar Ions
4. Sputtering by Ion Bombardment
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