Low‐Energy Sputtering Yields by Resonance Absorption and Emission Spectroscopic Methods
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1713273
Reference14 articles.
1. Kathodenzerstäubungsprobleme
2. Sputtering Yields at Very Low Bombarding Ion Energies
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4. Positive-Ion Bombardment of Germanium and Silicon
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