Amorphization processes in ion implanted Si: Ion species effects
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.108017
Reference7 articles.
1. Amorphization of Silicon by Ion Irradiation: The Role of the Divacancy
2. Amorphization processes in self‐ion‐implanted Si: Dose dependence
3. Multiphonon Raman Spectrum of Silicon
4. A Monte Carlo computer program for the transport of energetic ions in amorphous targets
5. Structural characterization of damage in Si(100) produced by MeV Si+ ion implantation and annealing
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