Interface stability and solid-state amorphization in an immiscible Cu–Ta system
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1630353
Reference13 articles.
1. Tantalum as a diffusion barrier between copper and silicon
2. Thermal stability of Cu/Ta/GaAs multilayers
3. Role of Interface in Ion Mixing or Thermal Annealing Induced Amorphization in Multilayers in Some Immiscible Systems
4. Solid-state amorphization at tetragonal-Ta/Cu interfaces
5. Formation of Cu diffusion channels in Ta layer of a Cu/Ta/SiO2/Si structure
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