Microbridge testing of plasma-enhanced chemical-vapor deposited silicon oxide films on silicon wafers
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1898449
Reference39 articles.
1. Fundamentals of Microfabrication
2. Thin Film Materials
3. An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments
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