Selective-area atomic layer epitaxy growth of ZnO features on soft lithography-patterned substrates
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1402959
Reference21 articles.
1. Atomic Layer Deposition of Oxide Thin Films with Metal Alkoxides as Oxygen Sources
2. Atomic layer epitaxy - a valuable tool for nanotechnology?
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4. Atomic layer epitaxy
5. ALE-reactor for large area depositions
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