Nondestructive determination of layers producing Franz-Keldysh oscillations appearing in photoreflectance spectra of heterojunction bipolar transistor structures based on their line-shape analysis

Author:

Takeuchi Hideo,Yamamoto Yoshitsugu,Nakayama Masaaki

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Reference34 articles.

1. Modulation spectroscopy of semiconductors: bulk/thin film, microstructures, surfaces/interfaces and devices

2. Franz–Keldysh oscillations in modulation spectroscopy

3. Nondestructive, room temperature analysis/qualification of wafer-sized semiconductor device structures using contactless electromodulation spectroscopy

4. Contactless electromodulation for the nondestructive, room-temperature analysis of wafer-sized semiconductor device structures

5. F. H. Pollak, W. Krystek, M. Leibovitch, H. Qiang, D. C. Streit, and M. Wojtowicz, in Proceedings of Internation Workshop on Semiconductor Characterization: Presents and Future Needs, edited by W. M. Bullis, D. G. Seiler, and A. C. Diebold (American Institute of Physics, Woodbury, NY, 1996), pp. 669–672.

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