Strain in self‐implanted silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.338849
Reference23 articles.
1. Unidirectional contraction in boron‐implanted laser‐annealed silicon
2. X‐ray study of lattice strain in boron implanted laser annealed silicon
3. X‐ray study of low‐temperature annealed arsenic‐implanted silicon
4. Strain induced amorphization of niobium by boron implantation
5. Deuterium location and migration in metals: Comparison of implantation and solid solution
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