Spatial and temporal variations of CF and CF2 radical densities in high-density CF4 plasmas studied by laser-induced fluorescence
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.366298
Reference12 articles.
1. Free Radicals in an Inductively Coupled Etching Plasma
2. Infrared diode laser absorption spectroscopy measurements of CFX (X=1–3) radical densities in electron cyclotron resonance plasmas employing C4F8, C2F6, CF4, and CHF3 gases
3. Drastic Change in CF2and CF3Kinetics Induced by Hydrogen Addition into CF4Etching Plasma
4. Production and destruction of CFx radicals in radio‐frequency fluorocarbon plasmas
5. Spatially and temporally resolved laser‐induced fluorescence measurements of CF2and CF radicals in a CF4rf plasma
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