Low energy, ion-induced electron and ion emission from stainless steel: The effect of oxygen coverage and the implications for discharge modeling
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.369330
Reference31 articles.
1. Evolution of the electron-energy-distribution function during rf discharge transition to the high-voltage mode
2. Secondary-electron and negative-ion emission from Al: Effect of oxygen coverage
3. Ion-induced secondary electron and negative ion emission from Mo/O
4. Negative ion emission from a stainless steel surface due to positive ion collisions
5. O2rf discharge structure in parallel plates reactor at 13.56 MHz for material processing
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