In situ sample temperature measurement in plasma immersion ion implantation
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1149801
Reference27 articles.
1. Plasma source ion implantation of oxygen and nitrogen in aluminum
2. Instrumental and process considerations for the fabrication of silicon-on-insulators (SOI) structures by plasma immersion ion implantation
3. Methane and nitrogen plasma immersion ion implantation of titanium metal
4. Enhancement of surface properties of 45# carbon steel using plasma immersion ion implantation
5. Wear resistance of plasma immersion ion implanted Ti6Al4V
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1. Prediction of the transient and steady temperature distributions in a two-layer composite slab in contact with a plasma: exact closed-form solutions;Journal of Physics D: Applied Physics;2007-06-04
2. A semi-analytical method to study the temperature evolutions of a slab and a semi-infinite target for plasma immersion ion implantation;International Journal of Heat and Mass Transfer;2007-03
3. The effects of repetitive pulses parameters on the temperature evolution of a film on a substrate for plasma immersion ion implantation;Journal of Physics D: Applied Physics;2006-11-03
4. Bias voltage influence on surface morphology of titanium nitride synthesized by dynamic nitrogen and titanium plasma immersion ion implantation and deposition;Materials Science and Engineering: A;2002-11
5. Effects of bias voltage on the corrosion resistance of titanium nitride thin films fabricated by dynamic plasma immersion ion implantation-deposition;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2002-01
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